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Porous silicon microreactors for lab-on-a-chip based flow through catalytical processes as well as continuous synthesis.
Photonic crystals (PCs) are new smart composite structures could control the propagation of electromagnetic waves with different frequencies.
The novel phenomenon appeared on PCs is the photonic band gap.
Based on these remarkable physical and engineering applications, PCs inspired researchers to replicate this idea on different types of waves e.g., elastic, acoustic, surface, electric and magnetic waves.
The PSi is a form of the silicon wafer that has introduced nanopores in its microstructure.
TY - THEST1 - Micromachining Based On Porous Silicon AU - Sun, Xiao PY - 2016Y1 - 2016N2 - Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS).
AB - Detailed investigations have been carried out into micromachining processes that will facilitate scalable, complex and uniform porosity structures based on porous silicon (PS) microelectromechanical systems (MEMS).In the present work, we present a novel metal/PSi-1DPC as a liquid sensor based on Tamm/Fano resonances.The operating wavelength range is from 6.35 to 9.85 μm in the mid-infrared (MIR) spectral region.The 1DPC sensor showed a sensitivity of about 200 nm/RIU, and it can be used for the determination of organic content in different liquid solutions.In addition to that, the well-known phenomenon Tamm resonance has been achieved in PCs and it has been used in the optical sensing techniques of PCs structures.Within the band gap, all frequencies of the incident electromagnetic waves are effectively attenuated.Breaking the periodicity of PCs and generating resonant modes inside the photonic band gaps increase the novelty of such periodic structures more than the perfect ones.The PSi-1DPC is a ternary structure composed of three different PSi layers repeated in N = 25 unit cells with a metal layer on the top of the ternary structure; Si/[PSi/metal.Also, we will study the optical properties and sensitivity of the proposed metal/PSi-1DPC sensor.It can be easily formed by electrochemical etching of silicon wafers in hydrofluoric acid (HF) electrolyte under an applied electric current.The electrochemical process allows for precise control over the properties of PSi such as porosity and thickness of the porous layer by adjusting the etching current density, time interval, and HF concentration.